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Uniformity of internal linear-type inductively coupled plasma source for flat panel display processing
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10.1063/1.2840997
/content/aip/journal/apl/92/5/10.1063/1.2840997
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/5/10.1063/1.2840997
/content/aip/journal/apl/92/5/10.1063/1.2840997
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/content/aip/journal/apl/92/5/10.1063/1.2840997
2008-02-08
2014-12-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Uniformity of internal linear-type inductively coupled plasma source for flat panel display processing
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/5/10.1063/1.2840997
10.1063/1.2840997
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