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Atomic scale study of the degradation mechanism of boron contaminated hafnium oxide
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10.1063/1.2841658
/content/aip/journal/apl/92/5/10.1063/1.2841658
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/5/10.1063/1.2841658
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The relative formation energy of B at (a) O3 sites, (b) O4 sites, and (c) interstitial sites. The red line indicates the most stable charge states at certain electron chemical potential.

Image of FIG. 2.
FIG. 2.

(a) The relaxed structure of charged boron ion at O3 sites; (b) local density of states of charged boron iron at O3 sites. Blue, red, and brown atoms stand for hafnium, oxygen, and boron, respectively.

Image of FIG. 3.
FIG. 3.

(a) The relaxed structure of charged boron ion at interstitial sites; (b) local density of states of charged boron iron at interstitial sites.

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/content/aip/journal/apl/92/5/10.1063/1.2841658
2008-02-07
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic scale study of the degradation mechanism of boron contaminated hafnium oxide
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/5/10.1063/1.2841658
10.1063/1.2841658
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