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Images of the MEMS tunable grating. (a) SEM image of entire MEMS device. (b) A closer view of the elastic PDMS bridge attached to the silicon comb drive. The inset is a magnified view of the grating pattern on the bridge. (c) Optical image of PDMS bridge at initial position. (d) Image of the bridge strained by MEMS actuator.
The test bed to conduct four separate optical experiments: setup (1) for dynamic response measurement setup, setup (2) for spectral acquisition measurement setup, setup (3) for variable signal measurement setup, and setup (4) for maximum sensitivity measurement.
Results from the change in grating period and spectroscopy measurements. (a) The time variation of the grating period calculated from the change in diffraction angle. Right axis shows the calculated incident wavelength onto the PMT detector. (b) PMT detection as the device is being actuated. (c) A spectral acquisition taken with one sweep of the device for the two-wavelength signal. Dotted lines mark the wavelengths of lasers being detected.
Spectral measurements for multiwavelength signal inputs varying with time. (a) Input signals of the red and yellow lasers measured separately. Yellow is constant while red is pulsed at . (b) Spectral acquisition measurements of input signal plotted versus time.
Results from the maximum sensitivity measurements. The dotted line indicates the detected laser wavelength at .
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