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Precipitation analysis on P-implanted silicon by reflectivity spectrum
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10.1063/1.2839575
/content/aip/journal/apl/92/6/10.1063/1.2839575
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2839575
/content/aip/journal/apl/92/6/10.1063/1.2839575
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/content/aip/journal/apl/92/6/10.1063/1.2839575
2008-02-11
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Precipitation analysis on P-implanted silicon by reflectivity spectrum
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2839575
10.1063/1.2839575
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