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Typical frequency spectrum of the photodetector signal consisting of a modulation peak at and of a signal peak at .
Optical setup of the heterodyne interferometer: PBS—polarizing beamsplitter, M—mirror, AOM—acoustooptic modulator, and PD—high speed photodetector.
(a) Photograph of a BAW resonator, (b) example of measured amplitude distribution at , (c) schematic representation of the layer stack, and (d) measured impedance response.
(a) Amplitude and (b) phase images of the vibration fields on top of the resonator, and (c) amplitude at the bottom of the acoustic mirror stack. (d) Fourier-filtered amplitude images of (c) with suppressed noise reveal similar vibration fields as on top of the resonator. All the scans cover the active area of the resonator with a lateral step size of , resulting in 90 000 data points in each image.
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