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Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations
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10.1063/1.2840183
/content/aip/journal/apl/92/6/10.1063/1.2840183
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2840183
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Typical frequency spectrum of the photodetector signal consisting of a modulation peak at and of a signal peak at .

Image of FIG. 2.
FIG. 2.

Optical setup of the heterodyne interferometer: PBS—polarizing beamsplitter, M—mirror, AOM—acoustooptic modulator, and PD—high speed photodetector.

Image of FIG. 3.
FIG. 3.

(a) Photograph of a BAW resonator, (b) example of measured amplitude distribution at , (c) schematic representation of the layer stack, and (d) measured impedance response.

Image of FIG. 4.
FIG. 4.

(a) Amplitude and (b) phase images of the vibration fields on top of the resonator, and (c) amplitude at the bottom of the acoustic mirror stack. (d) Fourier-filtered amplitude images of (c) with suppressed noise reveal similar vibration fields as on top of the resonator. All the scans cover the active area of the resonator with a lateral step size of , resulting in 90 000 data points in each image.

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/content/aip/journal/apl/92/6/10.1063/1.2840183
2008-02-12
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2840183
10.1063/1.2840183
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