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Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion
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10.1063/1.2841641
/content/aip/journal/apl/92/6/10.1063/1.2841641
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2841641
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

AFM images of ion beam eroded Si surfaces (ion fluence of ) at different ion incidence angles: (a) 5°, (b) 25°, and (c) 26°. The image sizes are [(a)–(c)], and the arrows denote the projection of the ion beam onto the surface. Please note the deviating (vertical) scales. [(d)–(f)] Corresponding Fourier images (image range of ).

Image of FIG. 2.
FIG. 2.

Angular distributions of ions leaving an aperture for different with and a plasma density of . The distributions are normalized to the total number of ions. The solid curves represent a Gaussian fit in order to deduce the maximum and the width of the distribution. The arrows indicate the position of the distribution maximum.

Image of FIG. 3.
FIG. 3.

Topography diagram for ion beam erosion of Si surfaces for different acceleration voltages and ion incidence angles . The symbols denote different patterns obtained for different pairs of : , hillock structures; ˟, parallel mode ripples; ⊗, co-existing ripples and dots; ○, dots; ▵, smooth surfaces.

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/content/aip/journal/apl/92/6/10.1063/1.2841641
2008-02-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2841641
10.1063/1.2841641
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