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SEM cross view of ICP etched holes using (a) process and (b) process.
(a) SEM view of a thick InP suspended membrane; (b) spectrally resolved measured spectrum; (c) calculated dispersion curve with point the crossing of the air light line, the cutoff of the odd mode, and the cutoff of the even mode.
(a) SEM view of a tethered guide; (b) spectrally resolved measured spectrum.
(a) SEM view of the integrated tethered access guide with W1; (b) Measured transmission spectrum; (c) Fourier transformed spectra in four spectral windows. Each curve corresponds to a wide spectral window (from on top to on the bottom). Spectral powers are vertically shifted for a clearer plot.
Measured transmission spectrum of a thinner membrane .
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