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Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere
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10.1063/1.2842427
/content/aip/journal/apl/92/6/10.1063/1.2842427
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2842427
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Single microhollow cathode configuration combined with venturi gas flow system.

Image of FIG. 2.
FIG. 2.

Breakdown voltages for various flow speeds from .

Image of FIG. 3.
FIG. 3.

Pressure changes with various flow speed.

Image of FIG. 4.
FIG. 4.

Photography of MHCD for the various value of the flow speed times hole diameter. Only the discharge in the condition of shows the entire hole filling that represents hollow cathode effect. In general, microhollow cathode discharge operates under the optimum condition. In this paper, since operating pressure in venturi system depends on the flow speed at region B, we considered the flow speed instead of the operating pressure for upper limit of hollow cathode effect.

Image of FIG. 5.
FIG. 5.

The relative spectral band signals of the first negative system of and the second positive system (SPS) of for the and air discharge at under . These signals normalized by peak intensity. We compared the relative intensity ratio for the two types of discharge shape; ring and circle. The circle shape, which represents hollow cathode effect, shows higher ratio than that of ring shape. From the results, we could estimate that the hollow cathode effect forms the highly reduced electric field strength in the discharge.

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/content/aip/journal/apl/92/6/10.1063/1.2842427
2008-02-13
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2842427
10.1063/1.2842427
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