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(a) pitch Ti electrodes fabricated by photolithography followed by successive gas assisted milling. (b) SEM image of an AFM Pt tip with a diameter of about , fabricated as described in the text. (c) SEM image of the same AFM Pt tip after several thousands of electrostatic force field measurements.
(a) Schematic drawing of the experimental AFM setup positioned within a glovebox with controlled humidity, temperature, and pressure. The external voltage source and gas supply are shown as well. (b) Vertical cross section showing the relative positions of the cantilever and nanoelectrodes (not at scale).
(a) Vertical electrostatic force field and topography of the pitch electrodes (el.) obtained by the improved layered imaging method. On the electrodes alternating and are applied. (b) Numerically simulated vertical electrostatic force field between 70 and above the pitch electrodes. Same conditions and a slightly simplified geometry are used as those during the measurements.
Comparison of measured (meas.) and simulated/calculated (calc.) force fields as already shown in Fig. 3 on the first electrode and between the first and second electrode as function of the distance from the electrode (el.) surface.
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