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Two-dimensional electrostatic force field measurements with simultaneous topography measurement on embedded interdigitated nanoelectrodes using a force distance curve based method
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10.1063/1.2844882
/content/aip/journal/apl/92/6/10.1063/1.2844882
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2844882
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) pitch Ti electrodes fabricated by photolithography followed by successive gas assisted milling. (b) SEM image of an AFM Pt tip with a diameter of about , fabricated as described in the text. (c) SEM image of the same AFM Pt tip after several thousands of electrostatic force field measurements.

Image of FIG. 2.
FIG. 2.

(a) Schematic drawing of the experimental AFM setup positioned within a glovebox with controlled humidity, temperature, and pressure. The external voltage source and gas supply are shown as well. (b) Vertical cross section showing the relative positions of the cantilever and nanoelectrodes (not at scale).

Image of FIG. 3.
FIG. 3.

(a) Vertical electrostatic force field and topography of the pitch electrodes (el.) obtained by the improved layered imaging method. On the electrodes alternating and are applied. (b) Numerically simulated vertical electrostatic force field between 70 and above the pitch electrodes. Same conditions and a slightly simplified geometry are used as those during the measurements.

Image of FIG. 4.
FIG. 4.

Comparison of measured (meas.) and simulated/calculated (calc.) force fields as already shown in Fig. 3 on the first electrode and between the first and second electrode as function of the distance from the electrode (el.) surface.

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/content/aip/journal/apl/92/6/10.1063/1.2844882
2008-02-13
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Two-dimensional electrostatic force field measurements with simultaneous topography measurement on embedded interdigitated nanoelectrodes using a force distance curve based method
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2844882
10.1063/1.2844882
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