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Schematic diagram of the matching circuit.
The dependence of the light emission at at different gas pressures on applied power (forward power minus reflected power).
The dependence of the ion density, plasma emission intensity at , and relative metastable density on (a) applied power and (b) plasma power at . The hysteresis and inaccessible regions are indicated in (a) and (b), respectively. Note that the ion density and emission intensity are shown on a log scale while the metastable density is shown on a linear scale.
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