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High quality nanoelectromechanical microwave resonator based on a carbon nanotube array
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10.1063/1.2857541
/content/aip/journal/apl/92/6/10.1063/1.2857541
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2857541
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) The implementation of the NEMS CNT resonator by integrating a CNT array deposited on a low resistivity Si substrate into a micromachined high-resistive substrate. (b) SEM photo of the nanotube array provided by Nanolab.

Image of FIG. 2.
FIG. 2.

The configuration of the trench in Si.

Image of FIG. 3.
FIG. 3.

The CNT array mounted inside the Si trench.

Image of FIG. 4.
FIG. 4.

The transmission (∣S21∣) of the CNT array as a function of frequency.

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/content/aip/journal/apl/92/6/10.1063/1.2857541
2008-02-14
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High quality nanoelectromechanical microwave resonator based on a carbon nanotube array
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2857541
10.1063/1.2857541
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