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(a) The implementation of the NEMS CNT resonator by integrating a CNT array deposited on a low resistivity Si substrate into a micromachined high-resistive substrate. (b) SEM photo of the nanotube array provided by Nanolab.
The configuration of the trench in Si.
The CNT array mounted inside the Si trench.
The transmission (∣S21∣) of the CNT array as a function of frequency.
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