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Broadband moth-eye antireflection coatings on silicon
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10.1063/1.2870080
/content/aip/journal/apl/92/6/10.1063/1.2870080
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2870080
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Figures

Image of FIG. 1.
FIG. 1.

Schematic illustration of the templating procedures for fabricating moth-eye ARCs on silicon substrates.

Image of FIG. 2.
FIG. 2.

(a) SEM image of a spin-coated monolayer non-close-packed colloidal crystal consisting of silica spheres. (b) Tilted (20°) SEM image showing templating silica array and underneath silicon nipples etched by RIE for . (c) Templated silicon nipple array after etch. (d) Silicon nipples after etch.

Image of FIG. 3.
FIG. 3.

Experimental (solid) and RCWA-simulated (dotted) specular optical reflection at normal incidence for a flat single-crystalline silicon substrate (black lines), a commercial single-crystalline silicon solar cell with ARC (blue line), and a etched silicon nipple array (red lines).

Image of FIG. 4.
FIG. 4.

Comparison between the calculated optical reflection at normal incidence by the RCWA model (red) and the thin-film multilayer model (blue) for an array of nipples with base radius and height.

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/content/aip/journal/apl/92/6/10.1063/1.2870080
2008-02-14
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Broadband moth-eye antireflection coatings on silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/6/10.1063/1.2870080
10.1063/1.2870080
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