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Schematic illustration of the templating procedures for fabricating moth-eye ARCs on silicon substrates.
(a) SEM image of a spin-coated monolayer non-close-packed colloidal crystal consisting of silica spheres. (b) Tilted (20°) SEM image showing templating silica array and underneath silicon nipples etched by RIE for . (c) Templated silicon nipple array after etch. (d) Silicon nipples after etch.
Experimental (solid) and RCWA-simulated (dotted) specular optical reflection at normal incidence for a flat single-crystalline silicon substrate (black lines), a commercial single-crystalline silicon solar cell with ARC (blue line), and a etched silicon nipple array (red lines).
Comparison between the calculated optical reflection at normal incidence by the RCWA model (red) and the thin-film multilayer model (blue) for an array of nipples with base radius and height.
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