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Surface proximity and boron concentration effects on end-of-range defect formation during nonmelt laser annealing
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10.1063/1.2885091
/content/aip/journal/apl/92/8/10.1063/1.2885091
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/8/10.1063/1.2885091
/content/aip/journal/apl/92/8/10.1063/1.2885091
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/content/aip/journal/apl/92/8/10.1063/1.2885091
2008-02-28
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface proximity and boron concentration effects on end-of-range defect formation during nonmelt laser annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/8/10.1063/1.2885091
10.1063/1.2885091
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