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Schematic experimental setup.
FTIR spectra of deposited films for different HMDSO flow rates (from ) in the absence of in the plasma.
Evolution of SiOSi asymmetric stretching AS1 peak position (◼) and FWHM (○) with respect to HMDSO flow rate.
Evolution of the oxygen on silicon ratio and the carbon percentage of deposited materials in pure HMDSO with respect to HMDSO flow rate. The lines are guides to the eye.
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