1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Dipole model explaining high-/metal gate field effect transistor threshold voltage tuning
Rent:
Rent this article for
USD
10.1063/1.2890056
/content/aip/journal/apl/92/9/10.1063/1.2890056
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/9/10.1063/1.2890056
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) characteristics at for with different HfSiON dopants. (b) Dopant type significantly affects . Maximum tuning of for SrO and minimum , tuning of for Sc. Similar transfer characteristics are observed for both and gate lengths (not shown).

Image of FIG. 2.
FIG. 2.

After spike anneal, FTIR RE–O–Si intensity increases for RE doped stacks while intensity decreases simultaneously. The inset shows a doped HfSiON sample before and after the annealing. RE dopants diffuse to the high-/low- interface enabling an interfacial dipole.

Image of FIG. 3.
FIG. 3.

(a) Median varies with dopant EN (proportional to ) affecting the dipole moment . (inset) Median varies with dopant radii (proportional to ), affecting the dipole moment .

Image of FIG. 4.
FIG. 4.

Interface dipole moment model. EWF shift (▵) is proportional to dipole moment due to the charge transfer in the Hf-O-RE configuration. The dipole moment magnitude varies with dopant type explaining the dependence on dopant type in Fig. 1.

Loading

Article metrics loading...

/content/aip/journal/apl/92/9/10.1063/1.2890056
2008-03-04
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dipole model explaining high-k/metal gate field effect transistor threshold voltage tuning
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/9/10.1063/1.2890056
10.1063/1.2890056
SEARCH_EXPAND_ITEM