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Size and frequency dependent gas damping of nanomechanical resonators
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Dependence of on pressure for two long, thick, high stress silicon nitride beams of similar vacuum frequency and (60 000), with different widths: and , (SEM shown in the inset). The vertical lines indicate the pressure range for which the Knudsen number is for the narrow (n) and wide (w) beam. (b) normalized by a fmf model, as a function of pressure for long, thick low stress silicon nitride beams, with widths of 86, 162, and . Deviations of 25% from the fmf model are marked at Kn numbers of 2.31, 1.95, and 0.81 , respectively.

Image of FIG. 2.
FIG. 2.

(a) as a function of Kn for beams from Fig. 1, as well as a wide beam suspended over a smaller gap. Isobars for the devices from Fig. 1(b) are plotted, from top to bottom, at 860, 568, 329, and . (b) Dependence of on beam width for long, thick low stress silicon nitride beams with widths ranging from , and gap heights of 750, 660, 460, and .

Image of FIG. 3.
FIG. 3.

dependence on air pressure for a long high stress beam, and its harmonics. (b) vs. frequency, at air pressures from for a long beam frequency-tuned using a chip-bending technique. Linear fits are shown. Inset: a compilation of vs at . for a mix of devices including fundamental modes of different length beams, stress-tuned beams, and harmonics covering a frequency range from , exhibiting from 17 to 600.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Size and frequency dependent gas damping of nanomechanical resonators