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Electrical spectroscopy of high resistivity ion-implanted layers by current-voltage measurements
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10.1063/1.2975372
/content/aip/journal/apl/93/10/10.1063/1.2975372
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2975372
/content/aip/journal/apl/93/10/10.1063/1.2975372
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/content/aip/journal/apl/93/10/10.1063/1.2975372
2008-09-12
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical spectroscopy of high resistivity ion-implanted layers by current-voltage measurements
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2975372
10.1063/1.2975372
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