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Performance improvement of phase-change memory cell with cup-shaped bottom electrode contact
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10.1063/1.2980029
/content/aip/journal/apl/93/10/10.1063/1.2980029
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2980029
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the memory cell with cup-shaped W-BEC. The TE and BE represent top electrode and bottom electrode, respectively.

Image of FIG. 2.
FIG. 2.

(a) Cross-sectional TEM image of the cup-shaped BEC based PCM cell; (b) SEM photograph of the surface morphology of the cup-shaped BEC; (c) SEM image of the cross-sectional structure of the cup-shaped BEC; and (d) SEM photograph of the surface morphology of the solid BEC with diameter of .

Image of FIG. 3.
FIG. 3.

(a) Typical characteristic of the PCM cell with cup-shaped BEC based PCM cell by current sweeping of four times. The initial state of the cell before each measurement was maintained at amorphous state; (b) corresponding characteristic after above each measurement, the pulse duration is varied from .

Image of FIG. 4.
FIG. 4.

Comparison of the characteristic of the cup-shaped BEC based PCM cell with same size solid BEC based PCM cell.

Image of FIG. 5.
FIG. 5.

(a) Thermal simulation results with mushroom heating region (left) and corresponding schematic diagram (right) for the cup-shaped BEC based PCM cell; (b) thermal simulation results (left) and corresponding schematic (right) for the solid BEC based PCM cell.

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/content/aip/journal/apl/93/10/10.1063/1.2980029
2008-09-09
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Performance improvement of phase-change memory cell with cup-shaped bottom electrode contact
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2980029
10.1063/1.2980029
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