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Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition
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10.1063/1.2981690
/content/aip/journal/apl/93/10/10.1063/1.2981690
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2981690
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Incident vapor flux of angle , strikes height variation thereby forming a shadow region .

Image of FIG. 2.
FIG. 2.

Theoretical model of porosity vs angle plotted with experimentally measured porosity data for (a) , and (b) ITO nanoporous films.

Image of FIG. 3.
FIG. 3.

Experimental deposition rate of (a) and (b) ITO nanoporous films, plotted with theoretical equation for deposition rate.

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/content/aip/journal/apl/93/10/10.1063/1.2981690
2008-09-11
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2981690
10.1063/1.2981690
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