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Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition
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10.1063/1.2981690
/content/aip/journal/apl/93/10/10.1063/1.2981690
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2981690
/content/aip/journal/apl/93/10/10.1063/1.2981690
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/content/aip/journal/apl/93/10/10.1063/1.2981690
2008-09-11
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/10/10.1063/1.2981690
10.1063/1.2981690
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