Full text loading...
(a) Schematic of a capacitive microphone integrated with a AgGeSe thin film to grow nanostructures on it and (b) 3D view of grown silver nanostructures on a parylene diaphragm, pictured by a Veeco NT9800 optical profilometer.
(a) The fabricated dual microphone integrated with a AgGeSe thin film, (b) grown silver nanostructures, and (c) backside view of a microphone.
(a) circuit schematic having a 0.1–200 kHz passband and (b) the microphone sensitivity over an audio frequency range measured in an EMI-shielded test fixture.
(a) Acoustic responses upon nanostructure growth and (b) corresponding analysis on sensitivity mismatch and DI, showing the reduction in mismatch and the increase in DI from ① (2.76, 3.5) to ② (1. 6, 4.6) at 3 kHz where (, ) (A dotted line is projected, and all units are in dB).
Article metrics loading...