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Calibration of shielded microwave probes using bulk dielectrics
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) SEM picture of the shielded cantilever probe. (b) Schematics of the layer structure of the cantilever body (top) and the tip region (bottom), as indicated by the dashed lines in (a). (c) Zoom-in SEM image near the tip area, showing the front Al layer, the pedestal, and the FIB Pt tip. A second Al electrode surrounding the tip is also seen in the picture. (d) Left: dimensions of the Pt tip used throughout this paper for FEA simulation. Right: mesh near the tip apex generated by the COMSOL program.

Image of FIG. 2.
FIG. 2.

(a) Schematics of the MIM setup. The shielded probe vibrates at low frequencies due to an ac excitation on the -piezo. The reflected signal is suppressed by the common-mode cancellation through a directional coupler (d), amplified by rf amplifiers (a), and demodulated by a quadrature mixer (m). The modulated signal is detected by a lock-in amplifier. (b) Simulated (solid lines) and measured (empty squares and circles) MIM-C signal as a function of the average tip-sample spacing. Both the first and second harmonics of the output are plotted. The inset shows the actual tip motion, which is truncated when hard contact occurs. (c) Comparison of MIM-C signals between the coplanar and stripline probes as a function of average tip-sample spacing. Both curves are scaled by the maximum signal for clarity.

Image of FIG. 3.
FIG. 3.

Peak MIM-C signal in tip-sample approaching as a function of the relative dielectric constant. Data from several insulators (symbols), as well as the FEA modeling result (solid line), are plotted. The data point at the upper-right is taken on a piece of crystal. Its effective dielectric constant is estimated to be from the measurement.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Calibration of shielded microwave probes using bulk dielectrics