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Flatband voltage-EOT relationship obtained from terraced oxide wafers deposited with 0–8 nm thick films.
Ordinate intercepts plotted against EOT of . Ordinate intercepts are the extrapolated intersections with in Fig. 1.
Comparison of FVRO behavior after shifting each group of data along the EOT axis to overlay each other. Inset shows the extracted roll-off starting point and corresponding minimum BIL thickness.
The amount of FVRO as a function of EOT of . FVRO amount is independent of thickness.
Summary of major parameters calculated according to Eq. (1).
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