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(a) Schematic of the . (b) Position of the in relation to laser and fluorescence imaging (cross sectional layer between the electrodes).
Relative O density in the discharge center vs admixture at 1.4 slm He flux, rf power of 12 W and the electrode gap of 1 mm.
Top photograph shows the electrode configuration. Bottom shows in parallel the relative axial distribution of atomic oxygen at 20 W and 1 mm electrode distance.
Absolute axial O densities inside the discharge channel at 40 W, 1.4 slm He plus 0.5% flux, and 2 mm electrode gap.
Variation in the rf power at a constant gas flux of 1.4 slm and 2 mm electrode gap in the discharge center.
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