1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition
Rent:
Rent this article for
USD
10.1063/1.2996273
/content/aip/journal/apl/93/13/10.1063/1.2996273
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/13/10.1063/1.2996273
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Thickness and the corresponding compressive stress of as-deposited hydrogenated amorphous carbon films deposited by dc-pulse plasma CVD at different growth times.

Image of FIG. 2.
FIG. 2.

structure of as-deposited hydrogenated amorphous carbon film. (a) HRTEM of hydrogenated amorphous carbon films prepared by dc-pulse plasma CVD. (b) XPS C core-level spectra for the hydrogenated carbon films deposited by dc-pulse plasma CVD (curve a) and rf-PECVD (curve b).

Image of FIG. 3.
FIG. 3.

Raman spectra of hydrogenated amorphous carbon films. (a) the corresponding fitted Raman spectra of the as-deposited hydrogenated carbon films deposited by dc-pulse plasma CVD; (b) the corresponding fitted Raman spectra of hydrogenated amorphous carbon film deposited by rf-PECVD.

Image of FIG. 4.
FIG. 4.

FTIR spectra for the hydrogenated carbon film deposited by dc-pulse plasma CVD and rf-PECVD.

Loading

Article metrics loading...

/content/aip/journal/apl/93/13/10.1063/1.2996273
2008-10-03
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/13/10.1063/1.2996273
10.1063/1.2996273
SEARCH_EXPAND_ITEM