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The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition
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10.1063/1.2996273
/content/aip/journal/apl/93/13/10.1063/1.2996273
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/13/10.1063/1.2996273
/content/aip/journal/apl/93/13/10.1063/1.2996273
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/content/aip/journal/apl/93/13/10.1063/1.2996273
2008-10-03
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/13/10.1063/1.2996273
10.1063/1.2996273
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