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Thermal decomposition products in arc evaporated TiAlN/TiN multilayers
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10.1063/1.2998588
/content/aip/journal/apl/93/14/10.1063/1.2998588
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/14/10.1063/1.2998588
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

XRD patterns obtained from multilayer in as-deposited and annealed state. Substrate peaks are labeled “.”

Image of FIG. 2.
FIG. 2.

STEM images of (a) as-deposited sample, (b) annealed sample, and (c) corresponding STEM-EDX line scans (start and end labeled “” and “”).

Image of FIG. 3.
FIG. 3.

Higher-magnification single layer STEM images of (a) as-deposited sample and (d) annealed sample and corresponding Al and Ti STEM-EDX elemental maps, respectively, in [(b)–(c)] as-deposited state and [(e)–(f)] annealed state.

Image of FIG. 4.
FIG. 4.

HR-TEM image and corresponding Fourier transformation pattern of the as-deposited sample.

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/content/aip/journal/apl/93/14/10.1063/1.2998588
2008-10-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermal decomposition products in arc evaporated TiAlN/TiN multilayers
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/14/10.1063/1.2998588
10.1063/1.2998588
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