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Shallow trench isolation liners and their role in reducing lattice strains
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10.1063/1.2999589
/content/aip/journal/apl/93/14/10.1063/1.2999589
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/14/10.1063/1.2999589
/content/aip/journal/apl/93/14/10.1063/1.2999589
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/content/aip/journal/apl/93/14/10.1063/1.2999589
2008-10-10
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Shallow trench isolation liners and their role in reducing lattice strains
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/14/10.1063/1.2999589
10.1063/1.2999589
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