banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Shallow trench isolation liners and their role in reducing lattice strains
Rent this article for


Image of FIG. 1.
FIG. 1.

The array of STI structures labeled with orientation and probing positions: (a) top, (b) middle, (c) entrance, (d) left bottom, and (e) right bottom. Magnified high angle annular dark field image shows inner liner layers of the structure.

Image of FIG. 2.
FIG. 2.

CBED patterns from the (a) [230] and (b) [340] zone axes. Simulated lines shown in blue overlay experimental lines. Both patterns are simulated using the lattice parameters of , , and , with an effective voltage of for both cases, confirming that the same strain is measured in both zone axes.

Image of FIG. 3.
FIG. 3.

STI structures with lateral forces shown on the five probed areas. Green arrows pointing outward represent tensile stress, while red arrows pointing inward represent compressive stress. (a) SOD only, (b) SOD with Si bottom fill, and (c) SOD with liner seen in the magnified high angle annular dark field image.


Generic image for table
Table I.

Lateral lattice displacements measured with CBED on the five probed areas of the STI structures. Vertical stresses were also measured but omitted based on relevance to this work. Positive numbers denote tensile strain, while negative numbers denote compressive.


Article metrics loading...


Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Shallow trench isolation liners and their role in reducing lattice strains