Full text loading...
Schematic process flows for different imprint techniques: (a) nanoimprint template coated with a fluorinated SAM prior the imprint; (b) nanoimprint template subjected to a plasma-assisted surface fluorination prior the imprint; (c) imprint resist subjected to a plasma-assisted surface fluorination, while the template remains untreated; (d) a template for microcontact printing is subjected to a plasma-assisted surface fluorination prior the elastomer application.
Water and glycerol contact angles after plasma fluorination using (a) and (b), as a function of rf discharge power, for different values of the chamber pressure.
Scanning electron micrograph of an array of dot pairs after NIL. The dot diameter is .
Array of fences formed in PDMS using a plasma fluorinated PMMA mold. The aspect ratio is 5:1.
Carbon/fluorine ratio vs depth ( plasma, ).
Article metrics loading...