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Plasma fluorination of carbon-based materials for imprint and molding lithographic applications
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10.1063/1.2944997
/content/aip/journal/apl/93/15/10.1063/1.2944997
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/15/10.1063/1.2944997

Figures

Image of FIG. 1.
FIG. 1.

Schematic process flows for different imprint techniques: (a) nanoimprint template coated with a fluorinated SAM prior the imprint; (b) nanoimprint template subjected to a plasma-assisted surface fluorination prior the imprint; (c) imprint resist subjected to a plasma-assisted surface fluorination, while the template remains untreated; (d) a template for microcontact printing is subjected to a plasma-assisted surface fluorination prior the elastomer application.

Image of FIG. 2.
FIG. 2.

Water and glycerol contact angles after plasma fluorination using (a) and (b), as a function of rf discharge power, for different values of the chamber pressure.

Image of FIG. 3.
FIG. 3.

Scanning electron micrograph of an array of dot pairs after NIL. The dot diameter is .

Image of FIG. 4.
FIG. 4.

Array of fences formed in PDMS using a plasma fluorinated PMMA mold. The aspect ratio is 5:1.

Tables

Generic image for table
Table I.

Carbon/fluorine ratio vs depth ( plasma, ).

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/content/aip/journal/apl/93/15/10.1063/1.2944997
2008-10-14
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Plasma fluorination of carbon-based materials for imprint and molding lithographic applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/15/10.1063/1.2944997
10.1063/1.2944997
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