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Buried melting in germanium implanted silicon by millisecond flash lamp annealing
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10.1063/1.2993332
/content/aip/journal/apl/93/15/10.1063/1.2993332
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/15/10.1063/1.2993332
/content/aip/journal/apl/93/15/10.1063/1.2993332
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/content/aip/journal/apl/93/15/10.1063/1.2993332
2008-10-13
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Buried melting in germanium implanted silicon by millisecond flash lamp annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/15/10.1063/1.2993332
10.1063/1.2993332
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