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Label-free porous silicon membrane waveguide for DNA sensing
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View: Figures


Image of FIG. 1.
FIG. 1.

SEM images of PSi membrane in (a) plan view and (b) cross section. The plan view image shows the slightly widened pores at the bottom of fabricated PSi layer after the electropolishing procedure separated the PSi layer from the silicon substrate. The cross-sectional image confirms the pore openings and reveals the roughness of the electropolished interface.

Image of FIG. 2.
FIG. 2.

(a) Schematic of PSi membrane waveguide biosensor. (b) Experimental (solid line) and theoretical (dotted line) angle-resolved attenuated total reflectance spectrum of PSi membrane waveguide showing the guided mode (50.5°) and substrate mode (37.9°). The simulation assumes the structure shown in (a) with a PSi membrane having a refractive index of 1.94 and a thick polymer layer of index 1.5.

Image of FIG. 3.
FIG. 3.

Measured angular shift of guided mode after exposure to various concentrations of 24-base pair DNA oligonucleotides. Three measurements were taken at each data point and the error bars are also shown. A linear fit of the data points suggests a sensitivity of and a detection limit of .


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Label-free porous silicon membrane waveguide for DNA sensing