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Observations of gas-phase nanoparticles during InGaN metal-organic chemical vapor deposition
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10.1063/1.3009291
/content/aip/journal/apl/93/17/10.1063/1.3009291
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/17/10.1063/1.3009291
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Laser illumination reveals a sharp layer of particles residing (in ) and (in ) from the heated surface during InN MOCVD near , (inverted stagnation point flow geometry). The outline of the heater has been highlighted with the red rectangle.

Image of FIG. 2.
FIG. 2.

Temperature dependence of the unpolarized light scattering signal for InN (a) and InGaN (b) conditions. TMIn flow rate , TMGa flow rate . Curve (c) is the fraction of indium converted into nanoparticles for InGaN conditions (see Fig. 3 caption).

Image of FIG. 3.
FIG. 3.

Angular dependence of the scattering intensity for (triangles) and (squares) polarization configurations during InGaN MOCVD at , . TMIn flow , TMGa flow .

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/content/aip/journal/apl/93/17/10.1063/1.3009291
2008-10-28
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Observations of gas-phase nanoparticles during InGaN metal-organic chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/17/10.1063/1.3009291
10.1063/1.3009291
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