Full text loading...
(a) characteristics of the MANOS samples after RTA or laser annealing (LA). The inset shows EOT and LA energy and XPS results of (b) RTA and (c) LA samples.
(a) XPS, (b) HR-XTEM, and (c) analysis data following RTA or LA.
(a) Leakage current density versus electrical field and (b) cumulative probability versus electrical field at .
Retention properties at under a positive stress voltage on the gate electrode. The inset diagram shows the charge loss mechanism of MANOS device.
Article metrics loading...