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Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source
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10.1063/1.2988192
/content/aip/journal/apl/93/19/10.1063/1.2988192
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.2988192
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic and results of numerical simulation and end source.

Image of FIG. 2.
FIG. 2.

Distribution of incident ions and radial velocity with and without the PE: (a) distribution of incident ions and (b) radial velocity of incident ions.

Image of FIG. 3.
FIG. 3.

Depth-dependent x-ray photoelectron binding energies of Ta and N after nitrogen PIII: (a) with PE and (b) without PE.

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/content/aip/journal/apl/93/19/10.1063/1.2988192
2008-11-10
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.2988192
10.1063/1.2988192
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