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High quality AlN grown on SiC by metal organic chemical vapor deposition
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10.1063/1.2988323
/content/aip/journal/apl/93/19/10.1063/1.2988323
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.2988323
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

AFM images of AlN grown at different growth modes: (a) 3D and (b) 2D.

Image of FIG. 2.
FIG. 2.

Schematic of AlN grown with 3D-2D MG method.

Image of FIG. 3.
FIG. 3.

AFM image of AlN grown with the 3D-2D modulation method.

Image of FIG. 4.
FIG. 4.

Scanning electron micrographs of the surface morphology: (a). crack-free AlN grown by the 3D-2D MG method, (b). Cracked 3D AlN.

Image of FIG. 5.
FIG. 5.

(002) scans of the crack-free MG AlN and the cracked 3D AlN.

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/content/aip/journal/apl/93/19/10.1063/1.2988323
2008-11-12
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High quality AlN grown on SiC by metal organic chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.2988323
10.1063/1.2988323
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