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AFM images of AlN grown at different growth modes: (a) 3D and (b) 2D.
Schematic of AlN grown with 3D-2D MG method.
AFM image of AlN grown with the 3D-2D modulation method.
Scanning electron micrographs of the surface morphology: (a). crack-free AlN grown by the 3D-2D MG method, (b). Cracked 3D AlN.
(002) scans of the crack-free MG AlN and the cracked 3D AlN.
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