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Charge states of vacancies in germanium investigated by simultaneous observation of germanium self-diffusion and arsenic diffusion
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10.1063/1.3025892
/content/aip/journal/apl/93/19/10.1063/1.3025892
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3025892
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Figures

Image of FIG. 1.
FIG. 1.

SIMS and simulated depth profiles of (upper profiles) and (lower profiles) in the isotope SLs implanted with at , . In both the upper and the lower profiles, broken lines and open circles represent the SIMS profiles before and after annealing at for , respectively. Solid curves are the simulation results.

Image of FIG. 2.
FIG. 2.

SIMS and simulated depth profiles of (upper profiles) and (lower profiles) in the isotope SLs implanted with at , . In both the upper and the lower profiles, broken lines and open circles represent the SIMS profiles before and after annealing at for , respectively. Solid curves are the simulation results.

Image of FIG. 3.
FIG. 3.

SIMS and simulated depth profiles of (upper profiles) and (lower profiles) in the isotope SLs implanted with at , . In both the upper and the lower profiles, broken lines, open circles, and open squares represent the SIMS profiles before and after annealing at for 3 and , respectively. Solid curves are the simulation results.

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/content/aip/journal/apl/93/19/10.1063/1.3025892
2008-11-11
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Charge states of vacancies in germanium investigated by simultaneous observation of germanium self-diffusion and arsenic diffusion
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3025892
10.1063/1.3025892
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