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Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low- dielectrics
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10.1063/1.3026528
/content/aip/journal/apl/93/19/10.1063/1.3026528
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3026528
/content/aip/journal/apl/93/19/10.1063/1.3026528
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/content/aip/journal/apl/93/19/10.1063/1.3026528
2008-11-11
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3026528
10.1063/1.3026528
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