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Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low- dielectrics
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10.1063/1.3026528
/content/aip/journal/apl/93/19/10.1063/1.3026528
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3026528

Figures

Image of FIG. 1.
FIG. 1.

FTIR spectra for pristine and plasma damaged OSG.

Image of FIG. 2.
FIG. 2.

Clusters used in quantum chemistry calculation.

Tables

Generic image for table
Table I.

Dipole moments and .

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/content/aip/journal/apl/93/19/10.1063/1.3026528
2008-11-11
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/19/10.1063/1.3026528
10.1063/1.3026528
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