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Er RBS signal of (a) , (b) mixture, and (c) , as deposited and after annealing treatments at for in and ambient.
XRD spectra of (a) annealed in and ambient and -treated mixture, (b) mixture and , both annealed in ambient, and (c) treated in . Open squares, open circles, and full circles indicate the diffraction peaks associated to the phase of Ref. 11, the phase of Ref. 13, and the phase of Ref. 14, respectively.
High resolution PL spectra obtained at by exciting with the line of an laser (a) -treated , (b) -treated , and (c) -treated , crystallized respectively in the phase of , a mixture of and phases of and the phase of . The spectra are offset for clarity; the used scaling factors are indicated.
Integrated room temperature PL intensity (full symbols) and lifetime (open symbols) as a function of the Si:Er atomic ratio for Er silicates films thermally treated in (circles) and (triangles) ambient. The lines are drawn to guide the eye.
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