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Mixed cation phases in sputter deposited nanolaminates
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10.1063/1.2957670
/content/aip/journal/apl/93/2/10.1063/1.2957670
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/2/10.1063/1.2957670

Figures

Image of FIG. 1.
FIG. 1.

High resolution XRD scans of the AG films in the all states in the range. Vertical lines indicate the positions of relevant standard peaks in this range (given in Table II).

Image of FIG. 2.
FIG. 2.

High resolution XRD scans of annealed film A in the range. The vertical lines indicate the positions of relevant peak assignments in this range (given in Table II).

Image of FIG. 3.
FIG. 3.

High resolution XRD scans of films B and C range. Vertical lines indicate the positions of relevant peak assignments in this range (given in Table II).

Image of FIG. 4.
FIG. 4.

Interplanar spacing of peak in films B and C vs annealing temperature.

Image of FIG. 5.
FIG. 5.

Vegard’s law analysis: interplanar spacing of peak for bulk and films B and C after anneal vs atomic fraction Ti in bilayer. Solid line is regression analysis fit to bulk data.

Tables

Generic image for table
Table I.

Nominal architecture of nanolaminate films.

Generic image for table
Table II.

Phase, lattice space group, plane, and interplanar spacing of relevant standards for comparison with observed XRD peaks.

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/content/aip/journal/apl/93/2/10.1063/1.2957670
2008-07-17
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mixed cation phases in sputter deposited HfO2–TiO2 nanolaminates
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/2/10.1063/1.2957670
10.1063/1.2957670
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