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Modulated precursor flow epitaxial growth of AlN layers on native AlN substrates by metal-organic chemical vapor deposition
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10.1063/1.2959064
/content/aip/journal/apl/93/2/10.1063/1.2959064
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/2/10.1063/1.2959064
/content/aip/journal/apl/93/2/10.1063/1.2959064
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/content/aip/journal/apl/93/2/10.1063/1.2959064
2008-07-15
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modulated precursor flow epitaxial growth of AlN layers on native AlN substrates by metal-organic chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/2/10.1063/1.2959064
10.1063/1.2959064
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