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Transmittance and absorption characteristics of thick AZO films grown at and postgrowth annealed in and FG.
The effect of annealing time on film resistivity for films grown at different oxygen pressures. Annealing was carried out in FG at .
The film resistance change as a function of stress temperature in air. Stress time at each temperature was . Resistivity measurements were made at room temperature. (Open symbols: unpassivated; filled symbols: passivated).
Long-term temperature stress tests for FG-annealed (, ) and passivated films prepared at and oxygen pressures.
Resistivity values for thick AZO films before and after annealing in air, nitrogen and FG.
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