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(a) Temperature-dependent ellipsometric constant measurement. (b) Temperature-dependent electrical resistivity measurement using four-point probe configuration. (c) XRD patterns of IGST layers heated to .
(a) , (b) , (c) , and (d) core-level spectra. Each spectrum was shifted in its vertical axis for a clearer view. The dash-dot lines are guides for the eye.
Atomic concentrations measured by ICP-AES [, etc.], crystallization temperature , Gaussian width (FWHM), and peak position of XPS spectra (the XPS peak was fitted assuming a single Gaussian distribution) (Ref. 16).
Proposed atomic position in NaCl-type IGST quaternary or system (Va denotes vacancy sites).
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