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(a) The scheme for patterning of the nanoparticle/polymer composite film by HL and RIE. (b) Schematics of the laser beam configuration for HL and polarization configurations for (c) column structure and (d) air-hole structure.
SEM image showing the surface of the nanoparticle/polymer composite film after a soft oxygen-plasma process. The inset shows the surface of the film without the oxygen-plasma process.
Etching rates of SU8 films (black solid line) and SNP/SU8 composite films (red dash line) as a function of the flow ratio.
SEM image (off-angle view) showing the SU8 air-hole structure with a triangular symmetry created by HL. The inset shows the top view of the same sample.
SEM images showing the top view of the fabricated air-hole structure with a triangular symmetry.
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