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Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching
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10.1063/1.2998541
/content/aip/journal/apl/93/20/10.1063/1.2998541
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/20/10.1063/1.2998541
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) The scheme for patterning of the nanoparticle/polymer composite film by HL and RIE. (b) Schematics of the laser beam configuration for HL and polarization configurations for (c) column structure and (d) air-hole structure.

Image of FIG. 2.
FIG. 2.

SEM image showing the surface of the nanoparticle/polymer composite film after a soft oxygen-plasma process. The inset shows the surface of the film without the oxygen-plasma process.

Image of FIG. 3.
FIG. 3.

Etching rates of SU8 films (black solid line) and SNP/SU8 composite films (red dash line) as a function of the flow ratio.

Image of FIG. 4.
FIG. 4.

SEM image (off-angle view) showing the SU8 air-hole structure with a triangular symmetry created by HL. The inset shows the top view of the same sample.

Image of FIG. 5.
FIG. 5.

SEM images showing the top view of the fabricated air-hole structure with a triangular symmetry.

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/content/aip/journal/apl/93/20/10.1063/1.2998541
2008-11-20
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/20/10.1063/1.2998541
10.1063/1.2998541
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