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The schematic of the oxidation process for (a) the initial rapid oxidation regime with and (b) the later slow oxidation state with .
The experimental data (see Ref. 13) of oxide thickness as a function of time compared to our theoretical model curves under the pressure of 1 Torr and at the oxidation temperature of 450, 400, and . The inset gives the comparison at the oxidation temperature of and under the pressure of 1, 0.1, and 0.01 Torr.
Arrhenius plots for the two different regimes. The black circle and red square correspond to the initial rapid oxidation regime and the slow oxidation state, respectively, the line is only used as guide for the eyes.
The fitting parameters of our model for the different regimes under the pressure of 1 Torr and at the temperature of 300, 400, .
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