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Top down schematic of the reference HDLT attached to the CHI KUNG diffusion chamber showing the RFEA and the two axial solenoids with the corresponding calculated magnetic field lines (red solid lines) and amplitude (color bar).
Top down schematic of the MS-HDLT showing the two axial and one transverse solenoids. The north of the transverse solenoid field is pointing outward from the source tube.
-axial profile of the IEDFs measured in the chamber using the RFEA ( to , ); operating conditions are 250 W rf power, 0.3 mTorr argon pressure, and the magnetic field configuration of Fig. 2. The black and red crosses correspond to the local plasma and ion beam potentials, respectively. The ion beam current profile is shown by the red circles. The location of the beam center defines the beam center line (dotted red line).
-axial profile of the ion beam current measured in the chamber using the RFEA ( to , ) as a function of for 250 W rf power and 0.3 mTorr pressure conditions. The triangles correspond to the midpoint between the FWHM -axial positions (dashed lines in Fig. 3) of the ion beam current profiles and the circles show the half integral beam center position . The solid line is the quadratic line of best fit through these circles. The right vertical axis shows the steering angle and is a nonlinear scale given by Eq. (1), such that the positions of the triangles and circles also correspond to the steering angle axis.
(open circles), (open triangles), and (open squares) as a function of for 250 W rf power and 0.3 mTorr pressure conditions.
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