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Quantitative scanning thermal microscopy using double scan technique
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10.1063/1.3033545
/content/aip/journal/apl/93/20/10.1063/1.3033545
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/20/10.1063/1.3033545
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of SThM probe in contact with sample and various heat transfer paths around the probe.

Image of FIG. 2.
FIG. 2.

Scanning electron micrographs of full silicon oxide SThM probe: Au–Cr junction at end of tip (left) and top view (right).

Image of FIG. 3.
FIG. 3.

Cantilever deflection and temperature measured by SThM probe as function of sample vertical position when Al heater line was raised toward the tip.

Image of FIG. 4.
FIG. 4.

Difference between temperature of sample and temperature measured by SThM tip in contact mode as a function of temperature jump during tip-sample contact.

Image of FIG. 5.
FIG. 5.

Modeled temperature profile, temperature profile obtained by double scan technique, temperature profile in contact mode, and profile in lift mode.

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/content/aip/journal/apl/93/20/10.1063/1.3033545
2008-11-20
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative scanning thermal microscopy using double scan technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/20/10.1063/1.3033545
10.1063/1.3033545
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