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Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas
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10.1063/1.3042264
/content/aip/journal/apl/93/23/10.1063/1.3042264
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/23/10.1063/1.3042264
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of an rf-biased inductively coupled discharge.

Image of FIG. 2.
FIG. 2.

Measured EEPF at 3 mTorr argon pressure with no inductive power and bias power of 80 W.

Image of FIG. 3.
FIG. 3.

Evolution of the EEPFs as increasing inductive power. Bias power was 80 W and gas pressure was 3 mTorr.

Image of FIG. 4.
FIG. 4.

Measured plasma density with an increase in inductive power. Bias power was 80 W and gas pressure was 3 mTorr. to mode transition occurred near 20 W of inductive power.

Image of FIG. 5.
FIG. 5.

Changes in (a) and and (b) population ratio of low energy electrons with inductive power. Bias power was 80 W and gas pressure was 3 mTorr.

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/content/aip/journal/apl/93/23/10.1063/1.3042264
2008-12-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/23/10.1063/1.3042264
10.1063/1.3042264
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