1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
f
Ultrafast laser direct-write actuable microstructures
Rent:
Rent this article for
Access full text Article
/content/aip/journal/apl/93/24/10.1063/1.2972116
1.
1.K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729 (2004).
http://dx.doi.org/10.1364/OL.21.001729
2.
2.R. Taylor, C. Hnatovsky, E. Simova, D. Rayner, M. Mehandale, V. Bhardwaj, and P. Corkum, Opt. Express 11, 775 (2003).
3.
3.Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, and K. Hirao, Opt. Express 12, 1908 (2004).
http://dx.doi.org/10.1364/OPEX.12.001908
4.
4.M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, Nature Mater. 3, 444 (2004).
http://dx.doi.org/10.1038/nmat1155
5.
5.T. Kondo, S. Matsuo, S. Juodkazia, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).
http://dx.doi.org/10.1063/1.1569987
6.
6.J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, Opt. Lett. 28, 301 (2003).
http://dx.doi.org/10.1038/421301a
7.
7.X. Liu, D. Du, and G. Mourou, IEEE J. Quantum Electron. 33, 1706 (1997).
http://dx.doi.org/10.1109/3.631270
8.
8.W. M. Steen, Laser Material Processing, 3rd ed. (Springer, London, 2003).
9.
9.T. G. Bifano, J. Perreault, R. K. Mali, and M. N. Horenstein, IEEE J. Sel. Top. Quantum Electron. 5, 83 (1999).
http://dx.doi.org/10.1109/2944.748109
10.
10.V. N. Savvate’ev, A. V. Yakimov, D. Davidov, R. M. Pogreb, R. Neumann, and Y. Avny, Appl. Phys. Lett. 71, 3344 (1997).
http://dx.doi.org/10.1063/1.120332
11.
11.L. M. Do, E. M. Han, Y. Niidome, M. Fujihira, T. Kanno, S. Yoshida, A. Maeda, and A. J. Ikushima, J. Appl. Phys. 76, 5118 (1994).
http://dx.doi.org/10.1063/1.357224
12.
12.R. H. Friend, R. W. Gymer, A. B. Holmes, J. H. Burroughes, R. N. Marks, C. Taliani, D. D. C. Bradley, D. A. Dos Santos, J. L. Brédas, M. Lögdlund, and W. R. Salaneck, Nature (London) 397, 121 (1999).
http://dx.doi.org/10.1038/16393
13.
13.W. Watanabe and K. Itoh, Opt. Express 10, 603 (2002).
14.
14.E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
http://dx.doi.org/10.1063/1.119677
15.
15.A. D. Senturia, 2002 IEEE/LEOS International Conference on Optical MEMS, Conference Digest, 2002 (unpublished), pp. 56.
16.
16.D. M. Bloom, Proc. SPIE 3013, 165 (1997).
http://dx.doi.org/10.1117/12.273868
17.
17.S. Kim, G. Barbastathis, and H. L. Tuller, J. Electroceram. 12, 133 (2004).
http://dx.doi.org/10.1023/B:JECR.0000034007.73050.0b
18.
18.See EPAPS Document No. for video demonstrations of ULEM device modulation capabilities. For more information on EPAPS, see http://www.aip.org/pubservs/epaps.html.[Supplementary Material]
19.
19.G. Zhou, L. Vj, F. S. Chau, and F. E. H. Tay, IEEE Photon. Technol. Lett. 16, 2293 (2004).
20.
journal-id:
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/24/10.1063/1.2972116
Loading
/content/aip/journal/apl/93/24/10.1063/1.2972116
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/93/24/10.1063/1.2972116
2008-12-19
2014-08-29

Abstract

Actuable microelectromechanical systems(MEMS),fabricated by direct “writing” of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths , intensity modulation amplitudes , and bandwidths , at 5–10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings.

Loading

Full text loading...

/deliver/fulltext/aip/journal/apl/93/24/1.2972116.html;jsessionid=brbxpb4bteg1.x-aip-live-02?itemId=/content/aip/journal/apl/93/24/10.1063/1.2972116&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/apl
true
true
This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrafast laser direct-write actuable microstructures
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/24/10.1063/1.2972116
10.1063/1.2972116
SEARCH_EXPAND_ITEM