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Ultrafast laser direct-write actuable microstructures
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Actuable microelectromechanical systems(MEMS),fabricated by direct “writing” of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths , intensity modulation amplitudes , and bandwidths , at 5–10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings.
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