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Gold silicon phase diagram showing the bulk eutectic composition. Note that the eutectic temperature is size dependent, exhibiting lower values at reduced dimensions.
Proposed mechanism for SLV (Solid-Liquid-Vapor) etching of silicon.
(a) AFM micrograph of annealed gold lines on H terminated Si(111) surface indicating eutectic formation. (b) AFM micrograph of SLV etched surface after halogen exposure at . Note the triangular features cover the entire surface due to conventional etching. The white arrows point to defects along the SLV etched lines.
(a) SLV etched features found on tilted samples demonstrating eutectic flow. The Au line is positioned on the left side of this image. (b) Gold silicide islands grown on gold nanowires annealed on Si(111) substrates. Note the well defined shape of the silicide that is epitaxially grown on the Si(111) substrate.
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