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Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
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10.1063/1.3058686
/content/aip/journal/apl/93/26/10.1063/1.3058686
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3058686
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

[(a)–(c)] Space- and time-resolved optical emission profiles of an atmospheric-pressure rf He discharge in (a) the mode , (b) the transition , and (c) the mode, . [(d)–(f)] Space- and time-resolved excitation profiles obtained with a 1D fluid code. [(g) and (h)] Space- and time-resolved excitation profiles obtained with a 1D fluid code with the secondary electron coefficient set to 0: (g) low current mode and (h) high current -like mode. White dotted lines indicate the approximate location of the sheath edges.

Image of FIG. 2.
FIG. 2.

Power absorbed by the electrons calculated as from the simulation data. Here. is the electron current density and is the electric field. (a) mode. (b) transition. (c) mode. (d) Percent of input power dissipated by the electrons calculated as .

Image of FIG. 3.
FIG. 3.

Simulation results. [(a) and (b)] Space- and time-resolved helium excitation profiles in a rf He discharge at (a) 2 Torr and (b) 760 Torr. (c) Electric field and (d) space charge in an atmospheric-pressure rf He discharge. In (c), negative values are set to 0 to facilitate the visualization of the evolution of the field profile.

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/content/aip/journal/apl/93/26/10.1063/1.3058686
2008-12-31
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3058686
10.1063/1.3058686
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