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Cross-sectional TEM micrograph of the as-grown and UV treated (2 h) YDZ∼250 Å film grown on Ge.
XPS spectra from YDZ/Ge interface before and after 2 h UV irradiation: (a) Ge spectrum, (b) Zr spectrum, and (c) Y spectrum.
NRA energy spectrum taken from 480 Å YDZ films grown on Ge. (Inset) Magnified spectrum near peak for the as-grown and after 2 h UV irradiated samples.
Areal density of oxygen in before and after UV irradiation.
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