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Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
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10.1063/1.3062847
/content/aip/journal/apl/93/26/10.1063/1.3062847
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3062847
/content/aip/journal/apl/93/26/10.1063/1.3062847
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/content/aip/journal/apl/93/26/10.1063/1.3062847
2008-12-31
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/93/26/10.1063/1.3062847
10.1063/1.3062847
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